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Virtuani, Alessandro and Marchionna, Stefano and Acciarri, Maurizio and Isella, Giovanni and von Känel, Hans (2006) Electron-Beam-Induced current imaging for the characterization of structural defects in Si1-xGex films grown by LEPECVD. Materials Science in Semiconductor Processing, 9 (4-5). pp. 798-801. ISSN 1369-8001
Marchionna, Stefano and Virtuani, Alessandro and Acciarri, Maurizio and Isella, Giovanni and von Känel, Hans (2006) Defect imaging of SiGe strain relaxed buffers grown by LEPECVD. Materials Science in Semiconductor Processing, 9 (4). pp. 802-805. ISSN 1369-8001