Virtuani, Alessandro and Marchionna, Stefano and Acciarri, Maurizio and Isella, Giovanni and von Känel, Hans (2006) Electron-Beam-Induced current imaging for the characterization of structural defects in Si1-xGex films grown by LEPECVD. UNSPECIFIED. Materials Science in Semiconductor Processing, 9 (4-5). pp. 798-801. ISSN 1369-8001